New, large area, high power and efficient 172nm lamp
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چکیده
A highly efficient, continuous wave 172nm Xenon excimer lamp scalable in power, size and geometry is reported. Data from a prototype device based on multiple corona discharges, operating in dense Xenon gas, confirmed the concept. Results imply that large lamps with uniform VUV-light output exceeding 100mW/cm and wall plug electrical power to VUV light conversion efficiencies approaching 50% can be built.
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